Proceedings of the 1986 International Congress on Renewable Energy Sources. Photovoltaic amorphous silicon starting with Si2H6 in a LPCVD system. International Congress on Renewable Energy Sources [18-23 Mayo 1986, Madrid].

Pastor, G. ...[et al.].
Consejo Superior de Investigaciones Científicas.

1987

v. 2
1113
CIENA

84-00-6674-X

A conventional LPCVD system is used for the a-Si:H growth. The Si2H6 used has a 90-95. ABSTRACT. of purity. H2(1-5. INTRODUCTION. ), SiH4 (3-4. AIM. ) and clorosilanes (1. SYSTEM. ) are other elements which are present. The H2 in the a-Si:H growth has been determined by infrared spectroscopy, the total growth of the film by Taplystep, and the photoconductivity by the standard method. The kinetic of deposition has been determined as a function of the pressure, flow and temperature. A very good uniformity is obtained at any point of work. The hydrogen content, that decreases when the temperature increases, varies between 5 and 9. GAS. , which, is in the normal range of photovoltaic applications.. EXPERIMENTAL. Growth rate. Uniformity. Hydrogen content. Optical bandgap. Photoconductivity. CONCLUSIONS. REFERENCES.

Presenta tbls. y gráfs.

GENERAL; ENERGIA FOTOVOLTAICA; CELDAS SOLARES; HIDROGENO; SILICIO;